Core Facilities

Multi-chamber molecular beam epitaxy growth system with in-situ sample holder/mask exchange stage

Oxford cryo-free dilution with fully-automated programmable magneto-transport measurement system

Temperature-dependent MOKE microscopy system

Lakeshore liquid helium-free probe station system

High-speed infrared photodetector characterization systems

Intelligent photonic chip characterization systems

Nanofabrication Cleanroom

Elionix ELS F125 Ebeam Lithography System

Evatec Clusterline Sputtering System

3 Lesker PVD 75 Sputtering System

Heidelberg Mask Less Aligner MLA150

Oxford Plasma Pro100 Plasma Enhanced Chemical Vapor Deposition System

Oxford PlasmaPro 100 Cobra Inductive Coupled Plasma Etching System

ACCURA OPTO is a flip-chip bonder