Multi-chamber molecular beam epitaxy growth system with in-situ sample holder/mask exchange stage
Oxford cryo-free dilution with fully-automated programmable magneto-transport measurement system
Temperature-dependent MOKE microscopy system
Lakeshore liquid helium-free probe station system
High-speed infrared photodetector characterization systems
Intelligent photonic chip characterization systems
Elionix ELS F125 Ebeam Lithography System
Evatec Clusterline Sputtering System
3 Lesker PVD 75 Sputtering System
Heidelberg Mask Less Aligner MLA150
Oxford Plasma Pro100 Plasma Enhanced Chemical Vapor Deposition System
Oxford PlasmaPro 100 Cobra Inductive Coupled Plasma Etching System
ACCURA OPTO is a flip-chip bonder
Post-Moore Microelectronics and Integrated Circuit Center, ShanghaiTech University
393 Middle Huaxia Road, Pudong, Shanghai, China, 201210
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